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Product Details 基本信息 ISBN-13 书号 9783030094553 Author 作者 Seongbo Shim Samsung Electronics Hwasung Korea (Republic Format 版本 平装-胶订 Pages Number 页数 138页 Publisher 出版社 Springer Berlin Heidelberg Publication Date 出版日期 2019-02-08 Language 语种 英语 Book Contents 内容简介 This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
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【预订】Micro and Nanomechanics, Volume 5 9783319875460 美国库房发货,通常付款后3-5周到货!
Product Details 基本信息 ISBN-13 书号 9783319875460 Author 作者 LaVern Starman Principal Electronics Device Engineer Wrigh Format 版本 平装-胶订 Pages Number 页数 81页 Publisher 出版社 Springer Berlin Heidelberg Publication Date 出版日期 2018-08-18 Language 语种 英语 Book Contents 内容简介 Micro-and Nanomechanics, Volume 5 of the Proceedings of the 2017 SEM Annual Conference & Exposition on Experimental and Applied Mechanics, the fifth volume of nine from the Conference, brings together contributions to this important area of research and engineering. ?The collection presents early findings and case studies on a wide range of areas, including:? MEMS & Energy Harvesting 1D & 2D Materials/Fabrication Micro/Nano Microscopy Techniques Nanomechanics Flexible & Stretchable Electronics Interfaces & Adhesion
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