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Product Details 基本信息 ISBN-13 书号 9783319819068 Author 作者 Celano, Umberto(作者) Format 版本 平装-胶订 Pages Number 页数 200页 Publisher 出版社 Springer Publication Date 出版日期 1800-01-01 Product Dimensions 商品尺寸 9.2 x 6.1 x 0.4 cm Shipping Weight 商品重量 630g Language 语种 英语
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Product Details 基本信息 ISBN-13 书号 9783030156114 Author 作者 Umberto Celano Format 版本 精装 Pages Number 页数 425页 Publisher 出版社 Springer Berlin Heidelberg Publication Date 出版日期 2019-07-31 Language 语种 英语 Book Contents 内容简介 The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described.
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【预订】Metrology and Physical Mechanisms in New Generation Ioni 美国库房发货，通常付款后3-5周到货！
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