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图书信息 书号: 9781441939807 作者: Terry L Alford 装帧: 平装-胶订 页数: 336页 出版社: Springer Us 尺寸: 22.9 x 15.2 x 2.5 cm 出版日期: 2010-10-29 重量: 454g 语种: 其它(含多语) 内容简介 Modern science and technology, from materials science to integrated ci
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Product Details 基本信息 ISBN-13 书号 9781441939807 Author 作者 Terry L. Alford Arizona State University Dept. Chemical & M Format 版本 平装-胶订 Pages Number 页数 336页 Publisher 出版社 Springer US Publication Date 出版日期 2010-10-29 Language 语种 英语 Book Contents 内容简介 Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on analysis of the structure and composition of the surface and the outer few tens to hundred nanometers in depth. It describes characterization techniques to quantify the structure, composition and depth distribution of materials with the use of energetic particles and photons. The book describes the fundamentals of materials characterizatio
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