预订 Reactive Sputter Deposition [ISBN:9783642095368] 【全球购】进口原版图书,约5-8周到达国内后发出
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【预订】Reactive Sputter Deposition 9783642095368 国外库房发货,通常付款后3-5周到货!
Product Details 基本信息 ISBN-13 书号 9783642095368 Author 作者 Diederik Depla Ghent University Dept. Solid State Sciences Format 版本 平装-胶订 Pages Number 页数 572页 Publisher 出版社 Springer Berlin Heidelberg Publication Date 出版日期 2010-11-25 Shipping Weight 商品重量 896g Language 语种 英语 Book Contents 内容简介 The most straightforwardmethod to change the surface properties of a ma- rial is to deposit a thin lm or coating on it. Hence, it is not surprising that an overwhelming amount of scienti?c and technical papers is published each year on this topic. Sputter deposition is one of the many so-called physical vapour deposition (PVD) techniques. In most cases, sputter deposition uses a magnetically enhanced glow discharge or magnetron discharge to produce the ions which bombard and sputter the cathode material. In the ?rst chapter of this book (Chap. 1), the details of the sputter p
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【预订】Reactive Sputter Deposition 9783540766629 国外库房发货,通常付款后3-5周到货!
Product Details 基本信息 ISBN-13 书号 9783540766629 Author 作者 Diederik Depla Ghent University Dept. Solid State Sciences Format 版本 精装 Pages Number 页数 572页 Publisher 出版社 Springer Berlin Heidelberg Publication Date 出版日期 2008-04-24 Shipping Weight 商品重量 1149g Language 语种 英语 Book Contents 内容简介 The most straightforwardmethod to change the surface properties of a ma- rial is to deposit a thin lm or coating on it. Hence, it is not surprising that an overwhelming amount of scienti?c and technical papers is published each year on this topic. Sputter deposition is one of the many so-called physical vapour deposition (PVD) techniques. In most cases, sputter deposition uses a magnetically enhanced glow discharge or magnetron discharge to produce the ions which bombard and sputter the cathode material. In the ?rst chapter of this book (Chap. 1), the details of the sputter process
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