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Product Details 基本信息 ISBN-13 书号 9783642719783 Author 作者 Ando Format 版本 平装-胶订 Pages Number 页数 282页 Publication Date 出版日期 2011-12-10 Product Dimensions 商品尺寸 9.2 x 6.1 x 0.6 cm Shipping Weight 商品重量 930g Language 语种 英语 Book Contents 内容简介 Semiconductor technology has developed considerably during the past several decades. The exponential growth in microelectronic processing power has been achieved by a constant scaling down of integrated cir,cuits. Smaller fea? ture sizes result in increased functional density, faster speed, and lower costs. One key ingredient of the LSI technology is the development of the lithog? raphy and microfabrication. The current minimum feature size is already as small as 0.2 /tm, beyond the limit imposed by the wavelength of visible light and rapidly approaching fundamental limits. The next generation of devices is highly likely to sh
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